KLA
RS 55 TC Four Point
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The KLA RS 55 TC Four Point is a four-point probe for resistivity mapping. The KLA RS 55 TC Four Point is also referred to as the KLA TENCOR PROMETRIX RS 55 TC FOUR POINT PROBE RESISTIVITY MAPPING SYSTEM. The KLA RS 55 TC Four Point is configured for 8-inch wafers.[1]
What it is
How it works
General reference — not yet source-verifiedFour-point probe equipment measures sheet resistance by making electrical contact at four points on a wafer surface.
Resistivity mapping systems use repeated probe measurements across a wafer to build a spatial map of electrical uniformity.
Where it fits in the process flow
General reference — not yet source-verifiedThe KLA RS 55 TC Four Point belongs in wafer metrology and electrical test rather than in wafer fabrication steps that change the material.
The KLA RS 55 TC Four Point is used after a wafer has undergone a process whose electrical uniformity needs verification.
Applications
What do the numbers mean?
Wafer handling1
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the RS 55 TC used for?
The RS 55 TC is a four-point probe resistivity mapping system used for measuring sheet resistance across semiconductor wafers.[1]
Who manufactured the RS 55 TC?
The RS 55 TC was manufactured by KLA (KLA-Tencor, Prometrix division).[3][2][1]
What equipment category does the RS 55 TC belong to?
The RS 55 TC is categorized as a Test & Probe tool.[2]
Not publicly documented
The following facts about the RS 55 TC Four Point are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the RS 55 TC Four Point are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RS 55 TC Four Point are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the RS 55 TC Four Point are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the RS 55 TC Four Point are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the RS 55 TC Four Point are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]KLA TENCOR PROMETRIX RS 55 TC FOUR POINT PROBE RESISTIVITY MAPPING SYSTEM, 8" setup. | SemiStar — semistarcorp.comsemistarcorp.com
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Equipment inventory listing
Last updated Oct 7, 2026.
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