KLA
Provisional entry — research in progress
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The KLA 6220 is a particle inspection system. The KLA 6220 is a bare wafer surface defect inspection system. The KLA 6220 uses a 30 mW argon-ion laser at 488 nm.[1][2]
The KLA 6220 uses a 30 mW argon-ion laser with a wavelength of 488 nanometers as its illumination source.[1]
The KLA 6220 is used for bare wafer surface defect inspection on opaque, polished surfaces that scatter less than five percent of incident light.[1]
The KLA 6220 achieves a defect sensitivity of 0.09 micrometer diameter PSL sphere equivalent with a capture rate greater than eighty percent.[1][2]
The throughput specification for the KLA 6220 is 100 wafers per hour at 200 millimeters with 0.12 micrometer sensitivity.[1][2]
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The defect sensitivity is 0.09 micrometer diameter PSL sphere equivalent with greater than eighty percent capture rate.[1][2]
The throughput is 100 wafers per hour at 200 millimeters and 0.12 micrometer sensitivity.[1][2]
The illumination source is a 30 milliwatt argon-ion laser operating at 488 nanometers wavelength.[1]
The KLA 6220 performs darkfield, non-patterned (bare wafer) surface particle inspection.[2]
The following facts about the 6220 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 6220 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 6220 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 6220 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 6220 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 6220 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 3, 2026.