Waferpedia

Kensington

WFH 4 C Wafer Robot

LithographyKensington WFH family
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KensingtonWFH 4 C Wafer Robot
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What it is

The Kensington WFH 4 C is a wafer handling robot designed for 6-inch wafers and includes an aligner. The machine is categorized as lithography equipment and is manufactured by Kensington (Kensington Laboratories).[1][2][3]

How it works

General reference — not yet source-verified

Wafer handling robots use programmable robotic arms equipped with vacuum or mechanical end-effectors to pick wafers from cassettes or chucks. A prealigner within the robot, or as an integrated module, uses optical sensors to detect wafer notch or flat and rotates the wafer to a consistent orientation before placement. The robot then transfers the aligned wafer to the next process station, such as a mask aligner or coater.

What do the numbers mean?

Wafer handling1

Wafer size
6 inch[1]
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Configuration & options5

with aligner[1]
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Aligner
Included[1]
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Category
Lithography[2]
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Manufacturer
Kensington[1]
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Model
WFH 4 C[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

Does the WFH 4 C include an aligner?

Yes, the WFH 4 C is supplied with an aligner.[1][2]

Who manufactured the WFH 4 C wafer robot?

The WFH 4 C wafer robot is manufactured by Kensington (Kensington Laboratories).[1][2][3]

What category of equipment is the WFH 4 C?

The WFH 4 C is categorized as lithography equipment.[2]

Not publicly documented

The following facts about the WFH 4 C Wafer Robot are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WFH 4 C Wafer Robot are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the WFH 4 C Wafer Robot are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the WFH 4 C Wafer Robot are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the WFH 4 C Wafer Robot are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the WFH 4 C Wafer Robot is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]AS Kensington Laboratories Wafer Handling Robot Model Wfh4c — spwindustrial.comspwindustrial.com
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Last updated Oct 10, 2026.

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