Waferpedia

EV Group

IQA 0047 Mask

LithographyEV Group IQA 0047 Mask family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

IQA 0047 Mask — Inventory photo
Fig. 01IQA 0047 MaskInventory photo[1]

What it is

The EV Group IQA 0047 Mask is a lithography mask aligner.[1][2]

How it works

General reference — not yet source-verified

A mask aligner is a lithography tool that aligns a photomask to a substrate and exposes the substrate through the mask pattern.

Mask aligners are used to transfer patterned features during photolithographic processing.

Where it fits in the process flow

General reference — not yet source-verified

A mask aligner sits in the lithography portion of the semiconductor process flow.

A mask aligner is used before downstream development and related pattern transfer steps in a wafer fabrication sequence.

Applications

General reference — not yet source-verified

A mask aligner is used for photolithography on substrates that require contact or proximity exposure of a mask pattern.

A mask aligner supports patterning work in semiconductor and microfabrication processes.

What do the numbers mean?

Optics & imaging1

Equipment name
EVG IQA 0047 Mask Aligner[1]
Accurate?

Configuration & options3

OEM
EV Group[1]
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Model
IQA 0047[1]
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Category
Lithography[2]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the IQA 0047 Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IQA 0047 Mask are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the IQA 0047 Mask are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the IQA 0047 Mask are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the IQA 0047 Mask are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the IQA 0047 Mask is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 4, 2026.

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