Waferpedia

Edwards

E 2 M 2

Edwards E 2 M 2 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

E 2 M 2 — Inventory photo
Fig. 01E 2 M 2Inventory photo[1]

Power

2.8 m³/h[2]

Vacuum

2.5×10⁻⁴ mbar[2]

What it is

The Edwards E 2 M 2 is a rotary vacuum pump.[1][2]

The Edwards E 2 M 2 is a single-stage or two-stage, direct-drive, sliding vane pump.[2]

The Edwards E 2 M 2 is an oil-sealed pump designed for reliable long-term operation in laboratory and industrial environments.[2]

How it works

An oil seal between the vanes and the chamber wall prevents backflow of gas and lubricates the bearing surfaces and rotor sealing faces.[2]

Where it fits in the process flow

The Edwards E 2 M 2 is a free-standing pump that draws vacuum on a chamber or foreline.[2]

Applications

The Edwards E 2 M 2 is used for general vacuum applications in laboratory and industrial settings.[2]

Rotary vane pumps of this type are employed for evacuation of chambers, backing of high-vacuum pumps, and handling of condensable vapors when equipped with a gas-ballast feature.[2]

What do the numbers mean?

Power & electrical7

Maximum displacement (50 Hz)
2.8 m³/h[2]
Accurate?
Maximum displacement (60 Hz)
3.4 m³/h[2]
Accurate?
Pneurop displacement (50 Hz)
2.4 m³/h[2]
Accurate?
Pneurop displacement (60 Hz)
2.9 m³/h[2]
Accurate?
Motor rotational speed (50 Hz)
1450 rpm[2]
Accurate?
Motor rotational speed (60 Hz)
1750 rpm[2]
Accurate?
Dimensions (A x B, single-phase motor variant)
449 mm x 131 mm[2]
Accurate?

Vacuum & pumping6

Ultimate vacuum (partial pressure, no gas-ballast)
2.5×10⁻⁴ mbar[2]
Accurate?
Ultimate vacuum (total pressure, no gas-ballast)
1×10⁻³ mbar[2]
Accurate?
Ultimate vacuum (partial pressure, full gas-ballast)
3×10⁻² mbar[2]
Accurate?
Maximum water vapour inlet pressure
15 mbar[2]
Accurate?
Maximum water vapour pumping rate
0.03 kg/h[2]
Accurate?
Maximum permitted outlet pressure (at full pump throughput)
0.5 bar gauge[2]
Accurate?

Configuration & options4

Recommended oil
Ultragrade 19[2]
Accurate?
Maximum oil capacity
0.55 litre[2]
Accurate?
Ambient temperature range (operation)
12 to 40 °C[2]
Accurate?
Ambient temperature range (storage)
-30 to 70 °C[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Maximum displacement (50 Hz)2.8 m³/h[2]
  • Maximum displacement (60 Hz)3.4 m³/h[2]
  • Pneurop displacement (50 Hz)2.4 m³/h[2]
  • Pneurop displacement (60 Hz)2.9 m³/h[2]
  • Ultimate vacuum (partial pressure, no gas-ballast)2.5×10⁻⁴ mbar[2]
  • Ultimate vacuum (total pressure, no gas-ballast)1×10⁻³ mbar[2]
  • Ultimate vacuum (partial pressure, full gas-ballast)3×10⁻² mbar[2]
  • Maximum water vapour inlet pressure15 mbar[2]
  • Maximum water vapour pumping rate0.03 kg/h[2]
  • Maximum permitted outlet pressure (at full pump throughput)0.5 bar gauge[2]
  • Motor rotational speed (50 Hz)1450 rpm[2]
  • Motor rotational speed (60 Hz)1750 rpm[2]
  • Dimensions (A x B, single-phase motor variant)449 mm x 131 mm[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of motor does the Edwards E 2 M 2 use?

The Edwards E 2 M 2 uses a single-phase or three-phase, four-pole, totally enclosed motor. Single-phase motors have an on/off switch and either an automatic or manual reset thermal overload device.[2]

What is the inlet port type on the Edwards E 2 M 2?

The Edwards E 2 M 2 has an NW25 inlet port with an adaptor flange. An NW25 centring ring and O-ring are supplied with the pump.[2]

What accessories are available for the Edwards E 2 M 2?

Accessories include an inlet catchpot, inlet dust filter, inlet desiccant trap, inlet chemical trap, solenoid-operated gas-ballast control valve, foreline trap, solenoid-operated pipeline valve, outlet mist filter, oil drain extension, vibration isolators, pump inlet adaptor, flexible bellows, and pump outlet adaptor.[2]

Not publicly documented

The following facts about the E 2 M 2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the E 2 M 2 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the E 2 M 2 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the E 2 M 2 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the E 2 M 2 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the E 2 M 2 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]idealvac.com — idealvac.comidealvac.com
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Last updated Sep 24, 2026.

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