Waferpedia

Disco

DGP 8761 + DFM 2800 In-Line

Dicing & GrindingDisco DGP 8761 family
Research Quality: 50% complete

The Disco DGP 8761 + DFM 2800 In-Line Grinder is a fully automatic grinder. The Disco DGP 8761 + DFM 2800 In-Line Grinder has 3-axis operation. The Disco DGP 8761 + DFM 2800 In-Line Grinder is configured for 200 mm and 300 mm wafers.[1]

DGP 8761 + DFM 2800 In-Line — Inventory photo
Fig. 01DGP 8761 + DFM 2800 In-LineInventory photo[1]

What it is

The Disco DGP 8761 + DFM 2800 In-Line is a semiconductor dicing and grinding system. The machine is a fully automatic in-line grinder with a 3-axis configuration.[1]

The Disco DGP 8761 + DFM 2800 In-Line is configured for 200 mm and 300 mm wafers. The machine includes robot pick inline handling for dedicated 200 mm and 300 mm wafers, a chuck table, a spinner table, and a foup opener unit.[1]

How it works

The Disco DGP 8761 + DFM 2800 In-Line uses automatic wheel position setup, vacuum maintenance using a vacuum ejector, and a Z3-axis processing point temperature sensor. The machine also includes a sub-air switching unit, a water temperature control unit, and primary piping joints for dry polish and other connected functions.[1]

Where it fits in the process flow

The Disco DGP 8761 + DFM 2800 In-Line supports host communication through SECS-1, SECS-2, and GEM. The machine also includes uninterruptible power supply external type hardware, EMO guard rings, transport jig hardware, and machine hoisting jig plus export packing hardware.[1]

Applications

The Disco DGP 8761 + DFM 2800 In-Line is configured with a dry polish specification and a DBG specification with a high-power atomizing nozzle. The machine is also equipped with NCG plus Auto TTV.[1]

What do the numbers mean?

Vacuum & pumping1

Vacuum Maintenance Using Vacuum Ejector[1]
Accurate?

Wafer handling6

Chuck Table 200 mm/300 mm Universal (Orientation Flat)[1]
Accurate?
Robot Pick Inline Dedicated (200mm/300mm Wafers Dedicated)[1]
Accurate?
Foup Opener Unit 300 mm wafers dedicated (with 200 mm adapter)[1]
Accurate?
Chuck table
200 mm/300 mm universal (orientation flat)[1]
Accurate?
Robot pick
Inline dedicated (200 mm/300 mm wafers dedicated)[1]
Accurate?
Foup opener unit
300 mm wafers dedicated (with 200 mm adapter)[1]
Accurate?

Control & software2

Primary piping joint for water temperature control unit (DTU1531)[1]
Accurate?
Power cable for the water temperature control unit (DTU1531) 7 m[1]
Accurate?

Configuration & options23

Fully Automatic[1]
Accurate?
3 Axis[1]
Accurate?
Spinner Table 200 mm/300 mm Universal (Orientation Flat)[1]
Accurate?
Transport jig Machine hoisting jig+ Export packing hardware[1]
Accurate?
USB Memory[1]
Accurate?
Primary Piping Joint for DGP8761 (Dry Polish Specification)[1]
Accurate?
Primary Piping Joint for Sub-Air Switching Unit[1]
Accurate?
Automatic Wheel Position Setup[1]
Accurate?
Sub-Air Switching Unit[1]
Accurate?
Z3-axis processing point temperature sensor (without adjustment jig)[1]
Accurate?
Host communication SECS-1/-2 and GEM compliant[1]
Accurate?
EMO Guard Ring for DGP8761[1]
Accurate?
EMO guard ring for DTU1531[1]
Accurate?
Power Cable for the DGP8761 7M[1]
Accurate?
Make
Disco[1]
Accurate?
Model
DGP 8761 + DFM 2800 In-Line[1]
Accurate?
Machine type
In-Line Grinder[1]
Accurate?
Automation
Fully automatic[1]
Accurate?
Axis
3 Axis[1]
Accurate?
Spinner table
200 mm/300 mm universal (orientation flat)[1]
Accurate?
Host communication
SECS-1/-2 and GEM compliant[1]
Accurate?
Post retrofit configuration[1]
Accurate?
Vintage
2012 Vintage[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationVacuum Maintenance Using Vacuum Ejector[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the machine support?

The machine supports 200 mm and 300 mm wafers.[1]

Is the machine fully automatic?

The machine is fully automatic.[1]

What host communication standards are included?

The machine is SECS-1, SECS-2, and GEM compliant.[1]

What handling hardware is included?

The configuration includes a robot pick inline dedicated unit, a foup opener unit, a transport jig, and machine hoisting jig plus export packing hardware.[1]

Not publicly documented

The following facts about the DGP 8761 + DFM 2800 In-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DGP 8761 + DFM 2800 In-Line are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DGP 8761 + DFM 2800 In-Line are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DGP 8761 + DFM 2800 In-Line are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DGP 8761 + DFM 2800 In-Line are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DGP 8761 + DFM 2800 In-Line is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Oct 7, 2026.

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