Waferpedia

Disco

DFG 8760 DFM 2700 In-Line Wafer Grinder Lapper

CMPDisco DFG family
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DFG 8760 DFM 2700 In-Line Wafer Grinder Lapper — Inventory photo
Fig. 01DFG 8760 DFM 2700 In-Line Wafer Grinder LapperInventory photo[1]

What it is

The Disco DFG 8760 / DFM 2700 is an in-line wafer grinder, lapper, and polisher.[2][1]

How it works

General reference — not yet source-verified

A wafer grinder removes material from a wafer surface by controlled abrasive action.

A lapper and polisher use planarizing contact to reduce thickness variation and improve surface finish.

Where it fits in the process flow

General reference — not yet source-verified

The machine operates before later assembly or downstream wafer processing steps that require a flatter or thinner substrate.

Applications

The Disco DFG 8760 / DFM 2700 is used for wafer grinding, lapping, and polishing tasks.[2][1]

What do the numbers mean?

Wafer handling2

Equipment type
In-Line Wafer Grinder / Lapper / Polisher[2]
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Wafer sizes
12 inch[1]
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Control & software2

HDD & Software[1]
Accurate?
Includes
Z2 NCG; Auto Label Printer; Dicing Tape Pre-Cut Unit; HDD & Software[1]
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Configuration & options12

DFG 8760
3 Axis Dry Polishing Type 2[1]
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Z1, Z2 Grinder[1]
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Z3 Polisher[1]
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Includes:[1]
Accurate?
Z2 NCG[1]
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Auto Label Printer[1]
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Dicing Tape Pre-Cut Unit[1]
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Make
Disco[2]
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Model
DFG 8760 / DFM 2700[2]
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Polishing type
3 Axis Dry Polishing Type[1]
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Axis / station configuration
Z1, Z2 Grinder - Z3 Polisher[1]
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Vintage
2006[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the model designation of this equipment?

The equipment is a Disco DFG 8760 / DFM 2700 In-Line Wafer Grinder / Lapper / Polisher.[2][1]

What are the configuration details of the DFG 8760 unit?

The DFG 8760 is a 3 Axis Dry Polishing Type 2 machine, with Z1 and Z2 grinding spindles and a Z3 polishing spindle.[1]

Not publicly documented

The following facts about the DFG 8760 DFM 2700 In-Line Wafer Grinder Lapper are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFG 8760 DFM 2700 In-Line Wafer Grinder Lapper are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DFG 8760 DFM 2700 In-Line Wafer Grinder Lapper are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DFG 8760 DFM 2700 In-Line Wafer Grinder Lapper are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DFG 8760 DFM 2700 In-Line Wafer Grinder Lapper are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DFG 8760 DFM 2700 In-Line Wafer Grinder Lapper is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Equipment inventory listing
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Last updated Oct 9, 2026.

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