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Disco

DFD 6362

Dicing & GrindingDisco DFD 6362 family
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DiscoDFD 6362
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Power

0.19 N·m[1]

Performance

Within 0.002 mm / 310 mm (Single error)[1]

What it is

The Disco DFD 6362 is a fully automatic dicing saw. The DFD 6362 is designed for processing 300 mm wafers. The DFD 6362 is equipped with a facing dual-spindle configuration.[1]

How it works

The DFD 6362 uses a lower arm to move a workpiece from a cassette to a pre-alignment stage. The lower arm then transfers the workpiece to a chuck table for cutting. After cutting, an upper arm moves the workpiece to a spinner table for cleaning and drying. The lower arm returns the cleaned workpiece to the cassette.[1]

The DFD 6362 includes an Automatic Blade Changer option that automates blade replacement and precut procedures after blade breakage or at end of blade life. The system scans a 2D barcode on the blade to prevent human error. The machine also features advanced graphical operation software that displays operation buttons on the same screen as the microscope picture.[1]

Where it fits in the process flow

The DFD 6362 can perform edge cutting functions and is equipped with options such as a CO2 injector, washing station, and UV exposure. The machine accepts standard 10-slot 300 mm cassettes or FF123 frames, integrating with upstream wafer handling systems.[4]

Applications

The DFD 6362 offers a throughput improvement of approximately seven percent compared to the previous model under the same conditions, achieved by a shortened distance between spindles and improved X-axis return speed. The machine supports spindle power ratings of 1.2 kW, 1.8 kW, and 2.2 kW, with rotation speed ranges from 6,000 to 60,000 min-1 for standard spindles and up to 80,000 min-1 for a high-speed rotation option. Positioning accuracy is within 0.002 mm over 310 mm travel.[1]

What do the numbers mean?

Power & electrical7

Spindle rated torque (1.2 kW / high-speed rotation)
0.19 N·m[1]
Accurate?
Spindle rotation speed range (1.2 kW / 1.8 kW)
6,000 – 60,000 min⁻¹[1]
Accurate?
Power supply phase
3 Phase[2]
Accurate?
Power frequency
50/60 Hz[2]
Accurate?
Voltage range
308 – 415 VAC ±10%, 3 Phase[2]
Accurate?
Standard spindle power
1.2 kW[3]
Accurate?
Optional spindle powers
1.8 kW or 2.2 kW[3]
Accurate?

Wafer handling2

Wafer size
300 mm[3]
Accurate?
Cassette type
Dual-stack cassette handler for 300 mm[3]
Accurate?

Performance1

Positioning accuracy (X axis)
Within 0.002 mm / 310 mm (Single error)[1]
Accurate?

Dimensions & facilities2

Equipment dimensions (W×D×H)
1,200 × 1,550 × 1,800 mm[1]
Accurate?
Equipment weight
Approx. 2,050 kg[1]
Accurate?

Configuration & options16

Max workpiece size
Φ300 mm[1]
Accurate?
X-axis cutting range
310 mm[1]
Accurate?
Cutting speed
0.1 – 1000 mm/s[1]
Accurate?
Y1/Y2 cutting range
310 mm[1]
Accurate?
Index step
0.0001 mm[1]
Accurate?
Z-axis max stroke
14.7 mm (for Φ2 inch blade); 14.9 mm (for Φ3 inch blade)[1]
Accurate?
θ-axis max rotating angle
380 deg[1]
Accurate?
Spindle rotation speed range (high-speed rotation)
20,000 – 80,000 min⁻¹[1]
Accurate?
Full load current
9 A[2]
Accurate?
Machine main breaker rating
20 A[2]
Accurate?
Vintage
2010[3]
Accurate?
Serial number
NL1049[3]
Accurate?
BCR system
Yes[3]
Accurate?
Touch screen display
Yes[3]
Accurate?
Automatic wheel covers
Yes[3]
Accurate?
Air ionizer
Yes[3]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Spindle rated torque (1.2 kW / high-speed rotation)0.19 N·m[1]
  • Spindle rotation speed range (1.2 kW / 1.8 kW)6,000 – 60,000 min⁻¹[1]
  • Power supply phase3 Phase[2]
  • Power frequency50/60 Hz[2]
  • Voltage range308 – 415 VAC ±10%, 3 Phase[2]
  • Standard spindle power1.2 kW[3]
  • Optional spindle powers1.8 kW or 2.2 kW[3]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What maximum workpiece size does the DFD 6362 support?

The DFD 6362 supports a maximum workpiece size of 300 mm.[1]

What is the cutting speed range of the DFD 6362?

The X-axis cutting speed range is 0.1 to 1,000 mm/s.[1]

What are the spindle speed ranges available for the DFD 6362?

For the 1.2 kW and 1.8 kW spindles, the rotation speed range is 6,000 to 60,000 min-1. For the high-speed rotation spindle, the range is 20,000 to 80,000 min-1. A 2.2 kW spindle is also available with a range of 3,000 to 30,000 min-1.[1]

What are the power requirements for the DFD 6362?

The DFD 6362 requires 3-phase power at 50/60 Hz, with voltage of 308 to 415 VAC ±10%.[2]

What is the positioning accuracy of the DFD 6362?

The positioning accuracy is within 0.002 mm over 310 mm travel (single error).[1]

Not publicly documented

The following facts about the DFD 6362 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFD 6362 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DFD 6362 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DFD 6362 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DFD 6362 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DFD 6362 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]disco.com.sg — disco.com.sgdisco.com.sg
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]agsemiconductor.comagsemiconductor.com
  4. [4]Disco DFD 6362 - C2MI — c2mi.cac2mi.ca
  5. [5]Equipment inventory listing
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Last updated Oct 7, 2026.

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