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Disco

DFD 6341 Fully Automatic Dicing

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DiscoDFD 6341 Fully Automatic Dicing
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Performance

0.001 mm[1]

Optics

0.00005 mm[1]

What it is

The Disco DFD 6341 is a fully automatic dual-spindle dicing saw for semiconductor wafer processing.[1]

The DFD 6341 is designed for eight-inch wafers.[1]

How it works

The DFD 6341 uses dual spindles and automated wafer handling to move a workpiece from cassette to pre-alignment, then to the chuck table for cutting, then to a spinner table for cleaning and drying before return to the cassette.[1]

The DFD 6341 includes a graphical user interface and an LCD touch panel for operator control.[1]

Where it fits in the process flow

The DFD 6341 performs cutting, cleaning, and drying as part of the same automated flow.[1]

Applications

The DFD 6341 is used for semiconductor wafer dicing and die separation.[2][1]

The DFD 6341 is used for high-volume wafer cutting operations and precision dicing of semiconductor substrates.[2]

What do the numbers mean?

Power & electrical2

Spindle rated torque
0.19 N·m (1.2 kW/High speed rotation), 0.29 N·m (1.8 kW), 0.7 N·m (2.2 kW?)[1]
Accurate?
Spindle rotation speed range
6,000 – 60,000 min⁻¹ (1.2 kW/1.8 kW), 20,000 – 80,000 min⁻¹ (High speed rotation), 3,000 – 30,000 min⁻¹ (2.2 kW?)[1]
Accurate?

Optics & imaging1

Z-axis Moving resolution
0.00005 mm[1]
Accurate?

Performance3

Positioning accuracy
Within 0.002/210 (Single error), Within 0.002/5[1]
Accurate?
Z-axis Repeatability accuracy
0.001 mm[1]
Accurate?
Optional high-speed flash alignment speed
600 mm/s[1]
Accurate?

Dimensions & facilities2

Equipment dimensions (W×D×H)
1,180 × 1,080 × 1,820 mm[1]
Accurate?
Equipment weight
Approx. 1,500 kg[1]
Accurate?

Configuration & options7

Max workpiece size
Φ8 inch[1]
Accurate?
X-axis Cutting range
210 mm[1]
Accurate?
Cutting speed
0.1 to 1,000 mm/s[1]
Accurate?
Y1・Y2-axis Cutting range
210 mm[1]
Accurate?
Index step
0.0001 mm[1]
Accurate?
Z-axis Max stroke
19.22 mm (for Φ2 inch blade), 19.9 mm (for Φ3 inch blade)[1]
Accurate?
θ-axis Max rotating angle
380 deg[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Spindle rated torque0.19 N·m (1.2 kW/High speed rotation), 0.29 N·m (1.8 kW), 0.7 N·m (2.2 kW?)[1]
  • Spindle rotation speed range6,000 – 60,000 min⁻¹ (1.2 kW/1.8 kW), 20,000 – 80,000 min⁻¹ (High speed rotation), 3,000 – 30,000 min⁻¹ (2.2 kW?)[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the DFD 6341 process?

The DFD 6341 is designed for eight-inch wafers.[1]

Does the DFD 6341 use single or dual spindles?

The DFD 6341 uses dual spindles.[1][2]

What automated handling sequence does the DFD 6341 perform?

The DFD 6341 moves the workpiece from cassette to pre-alignment, then to the chuck table for cutting, then to the spinner table for cleaning and drying, and then returns the workpiece to the cassette.[1]

Does the DFD 6341 include a user interface for operation?

The DFD 6341 includes a graphical user interface and an LCD touch panel.[1]

Not publicly documented

The following facts about the DFD 6341 Fully Automatic Dicing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFD 6341 Fully Automatic Dicing are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DFD 6341 Fully Automatic Dicing are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DFD 6341 Fully Automatic Dicing are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DFD 6341 Fully Automatic Dicing are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DFD 6341 Fully Automatic Dicing is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]disco.com.sg — disco.com.sgdisco.com.sg
  2. [2]DFD6341 PDF Manual - Fully Automatic Dicing Saw — datasheetgo.comdatasheetgo.com
  3. [3]Equipment inventory listing
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Last updated Sep 26, 2026.

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