Disco
DAD 3221 Automatic Dicing
The Disco DAD 3221 Automatic Dicing Saw is a single-spindle dicing saw. The Disco DAD 3221 Automatic Dicing Saw is capable of handling and dicing work pieces up to 6-inch wafers. The Disco DAD 3221 Automatic Dicing Saw has machine dimensions of 490 mm × 870 mm × 1,670 mm.[1][2]
Power
380–420 V, 3 phases, 50 Hz[1]
Performance
0.005 mm / 160 mm (single error)[2]
Optics
0.000002 mm[2]
What it is
How it works
The machine incorporates an automatic kerf check function to monitor cut quality and an auto-focus system for the alignment microscope.[1]
Condition monitoring parameters such as spindle rotation speed, spindle current, vacuum level, and air pressure are displayed on a 15-inch LCD touch-panel monitor with a graphical user interface.[1]
Where it fits in the process flow
General reference — not yet source-verifiedThe dicing saw is used after wafer thinning and mounting on dicing tape, cutting the wafer in one or two passes to separate individual die.
Downstream steps include die picking, cleaning, and packaging; the cut quality directly affects die strength and yield.
Applications
General reference — not yet source-verifiedThe machine is primarily used for dicing silicon wafers into integrated circuits and other semiconductor devices.
What do the numbers mean?
Power & electrical5
- Internal transformer, 380-420V, 3 phases, 50 Hz[1]
Vacuum & pumping2
Wafer handling5
Optics & imaging4
Performance2
Control & software1
- 15” LCD Monitor and graphical user interface (GUI)[1]
Dimensions & facilities4
Configuration & options26
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- ADT 7500 Dicing— Same function class: Dicing & Grinding, UnknownCompare in depthsource[3]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationCondition monitoring function (spindle rpm, spindle current, vacuum, air pressure, etc. are displayed on the touch panel monitor)[1]
- ConfigurationAutomatic lens shutter with air pressure blow[1]
- ConfigurationInternal transformer, 380-420V, 3 phases, 50 Hz[1]
- Internal transformer / power380–420 V, 3 phases, 50 Hz[1]
- Spindle power2.0 kW (standard), 1.8 kW (option)[2]
- Power supply380-420 V, 3 phases, 50 Hz (internal transformer)[1]
- Rated torque (2.0 kW spindle)0.48 N·m[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the maximum workpiece size for the DAD 3221?
The DAD 3221 can handle wafers up to 6 inches (150 mm) in diameter, and up to 150 mm square with a user-specified specification.[1][2]
Does the DAD 3221 support automatic alignment and focus?
Yes, the DAD 3221 includes automatic calibration, automatic focus, and automatic kerf check functions.[1][2]
What is the X-axis cutting speed range of the DAD 3221?
The X-axis cutting speed range is 0.1 to 800 mm/s.[2]
Not publicly documented
The following facts about the DAD 3221 Automatic Dicing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DAD 3221 Automatic Dicing are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the DAD 3221 Automatic Dicing are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the DAD 3221 Automatic Dicing are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DAD 3221 Automatic Dicing are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DAD 3221 Automatic Dicing is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]web.archive.org — disco.co.jp (Apr 11, 2026)web.archive.org
- [3]Equipment inventory listing
Last updated Oct 1, 2026.
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