Waferpedia

Despatch

AST-3100

Automated polyimide curing tool200mmDespatch AST-3100 family
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AST-3100 — web.archive.org
Fig. 01AST-3100web.archive.org[1]

Wafer size

200mm

Performance

±1.0°C at 350°C soak[1]

What is it?

The Despatch AST-3100 is an automated polyimide curing tool designed for 200mm and 300mm wafers.

What do the numbers mean?

Power & electrical1

Options
Wafer ID reader and uninterruptible power supply (UPS)[1]
Accurate?

Wafer handling11

Automated processing
Designed for automated horizontal processing of wafers[1]
Accurate?
Wafer compatibility
Accepts both 200mm and 300mm wafers[1]
Accurate?
Temperature uniformity
±1.0°C between each wafer and across all 50 wafers in the chamber during immersion at 350°C[1]
Accurate?
Tool capacity
100 wafers with standard two-chamber configuration[1]
Accurate?
Chambers
Two chambers, each holding 50 wafers and operating independently during the process cycle[1]
Accurate?
Automation function options
Four front-opening unified pod (FOUP) loading stations, atmospheric class 1 cleanroom-compatible robot, and optically based class 1 laser cassette imaging sensor[1]
Accurate?
Wafer capacity
100 wafers (standard two-chamber configuration)[1]
Accurate?
Chamber configuration
Two independent chambers, each holding 50 wafers[1]
Accurate?
Automation system
Brooks automated wafer handling system[1]
Accurate?
Robot
Atmospheric class 1 cleanroom-compatible robot[1]
Accurate?
Wafer sensor
Optical based class 1 laser cassette imaging sensor[1]
Accurate?

Performance1

Temperature uniformity
±1.0°C at 350°C soak[1]
Accurate?

Control & software1

GUI
Graphical user interface[1]
Accurate?

Configuration & options12

Inert atmosphere maximum operating temperature
350°C[1]
Accurate?
Cooling
Active cooling for rapid cooling[1]
Accurate?
Filtration
HEPA filter[1]
Accurate?
Compliance
Meets SEMI S2/S8 and SEMATECH Appendices A, B, and C[1]
Accurate?
Communications standards
Meets 300mm SEMI communications standards[1]
Accurate?
Monitoring options
2-level monitoring[1]
Accurate?
Maximum operating temperature
350°C[1]
Accurate?
Loading stations
Four FOUP loading stations[1]
Accurate?
Inert atmosphere
Available[1]
Accurate?
Active cooling
For rapid cooldown[1]
Accurate?
HEPA filter
Yes[1]
Accurate?
Compliance
SEMI S2/S8 and SEMATECH appendices A, B, C; 300mm SEMI communication standards[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • OptionsWafer ID reader and uninterruptible power supply (UPS)[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the AST-3100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AST-3100 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the AST-3100 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the AST-3100 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the AST-3100 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the AST-3100 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
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Last updated Sep 22, 2026.