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Dektak

3030

Surface ProfilerDektak 3030 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Dektak3030
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  • Plate 01Dektak 3030 Demo video

    Ollie Dunne Tara SemiWatch on YouTube

  • Plate 02Sitek Process Solutions - Dektak 3030 Profilometer Source Inspection

    Sitek Process SolutionsWatch on YouTube

What it is

General reference — not yet source-verified

The Dektak 3030 is a surface profiler. Surface profilers are instruments that measure the topography of a surface by tracing a stylus across it.

How it works

General reference — not yet source-verified

The Dektak 3030 operates as a stylus profilometer. A diamond-tipped stylus is brought into mechanical contact with the sample surface and is scanned along a linear path.

Where it fits in the process flow

General reference — not yet source-verified

Downstream steps may include further processing or final device testing. The profiler is typically located in a metrology laboratory or cleanroom, separate from the process tools.

Applications

General reference — not yet source-verified

Additional applications include measuring the thickness of layers on patterned wafers, verifying planarization uniformity, and inspecting defects such as scratches or particles on surfaces.

What do the numbers mean?

Configuration & options4

Model
3030[1]
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Equipment name
Dektak 3030 Surface Profiler[1]
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designation
Dektak 3030[1]
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category
Surface Profiler[1]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

Is this class of machine used for direct measurement?General reference — not yet source-verified

Yes. Surface profilers measure the surface itself, rather than inferring topography from an indirect signal.

Not publicly documented

The following facts about the 3030 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 3030 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 3030 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 3030 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 3030 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 3030 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]nanolab.berkeley.edu — nanolab.berkeley.edunanolab.berkeley.edu
  2. [2]Capabilities — nanolab.berkeley.edunanolab.berkeley.edu
  3. [3]Metrology — nanolab.berkeley.edunanolab.berkeley.edu
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Last updated Oct 3, 2026.