CEE
200CBX
The CEE 200CBX is a precision coat-bake system that combines a track-quality precision spin coater with a high-uniformity bake plate. The CEE 200CBX handles substrates up to 200mm round. The CEE 200CBX spins at speeds up to 6000 rpm.[1][2]
Plate 01CEE\Brewer Science 200CBX Spin Coater\Hot Plate #60654
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Wafer size
200mm
Performance
precision coat-bake system[1]
Gas delivery
photoresist spinner[1]
Control era
Windows
What it is
How it works
The CEE 200CBX uses a Windows-based PC graphical user interface for entering, monitoring, and storing programs.[1]
Where it fits in the process flow
The CEE 200CBX is used with hand-dispensed coatings applied by pipette and supports substrates up to 200 mm round or 7 in. square.[1]
Applications
The CEE 200CBX is used for photoresist spinning and coating tasks in lithography workflows.[1][2][3]
The CEE 200CBX spins at speeds up to 6000 rpm.[1]
- photoresist spinning
- spin-bake processing
- coating substrates
What do the numbers mean?
Wafer handling1
Gas & chemistry1
Performance4
Control & software2
Configuration & options7
Vintage & configurations
Control-system eraWindows[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Usage descriptionphotoresist spinner[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What substrate sizes can the CEE 200CBX handle?
The CEE 200CBX applies coatings to substrates up to 200 mm round or 7 in. square.[1]
Does the CEE 200CBX include a bake stage?
The CEE 200CBX is a precision coat-bake system with a high-uniformity bake plate.[1][2]
What kind of program control does the CEE 200CBX use?
The CEE 200CBX programs are entered, monitored, and stored through a Windows-based PC graphical user interface.[1]
Not publicly documented
The following facts about the 200CBX are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 200CBX are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 200CBX are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
No publicly documented failure modes or field errata for the 200CBX are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 200CBX is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 200CBX are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]cores.research.asu.edu — cores.research.asu.educores.research.asu.edu
- [2]cnsi.ucsb.edu — cnsi.ucsb.educnsi.ucsb.edu
- [3]udnf.udel.edu — udnf.udel.eduudnf.udel.edu
Last updated Oct 3, 2026.