Cascade Microtech
Summit 12000
The Cascade Microtech Summit 12000 is a probe station (prober) for semiconductor testing. The Summit 12000 handles 8-inch wafers and includes a temperature-controlled chuck ranging from -65°C to +200°C.[1][2]
What it is
How it works
The Summit 12000 uses a shielded chuck with an Attoguard Microchamber for controlled environmental measurements.[1]
Where it fits in the process flow
General reference — not yet source-verifiedThe Summit 12000 is used in the test and characterization step of the semiconductor manufacturing flow, after wafer fabrication and before final packaging.
Probe stations of this class allow electrical measurements on individual die or test structures on a whole wafer.
Applications
General reference — not yet source-verifiedThe Summit 12000 is used for device characterization, parametric testing, and failure analysis of semiconductor wafers.
What do the numbers mean?
Power & electrical1
- Anritsu MG 3632 A Synthesized Signal Generator[4]
Wafer handling5
- Temperature
- 200 mm thermal chuck with Temptronic temperature controller (range of -65°C to +200°C)[1]
Optics & imaging2
Performance1
Control & software1
- att Control Unit[4]
Configuration & options10
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationAnritsu MG 3632 A Synthesized Signal Generator[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
How many manipulators does the Summit 12000 support?
The Summit 12000 supports up to 8 manipulators.[2]
What is the X-Y stage resolution of the Summit 12000?
The X-Y stage resolution is 0.1 micron.[1]
What is the X-Y stage accuracy of the Summit 12000?
The X-Y stage accuracy is plus or minus 2 micron.[1]
Not publicly documented
The following facts about the Summit 12000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Summit 12000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Summit 12000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Summit 12000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Summit 12000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Summit 12000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]inventory listing
- [3]Inventory photo
- [4]inventory listing
- [5]Equipment inventory listing
- [6]Equipment inventory listing
Last updated Sep 29, 2026.
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