Cascade Microtech

Summit 11000

Q: What type of tool is the Summit 11000?

The Summit 11000 is a manual wafer prober in the Summit 11000 series.

Test & Probe Cascade Microtech Summit 11000 family

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The Cascade Microtech Summit 11000 is a manual wafer prober for 8 inch (200mm) wafers. The Summit 11000 supports DC/CV measurement analysis and RF/microwave analysis with on-wafer measurements up to 110 GHz.^[1]^[2]^[3]

Summit 11000 — Inventory photo — Fig. 01Summit 11000Inventory photo^[4]

Power

110 GHz^[2]

Performance

< 2 μm^[1]

Optics

0.2″ per turn^[1]

What it is

The Summit 11000 is a manual wafer prober in the Summit 11000 series.^[1]^[6]

How it works

The Summit 11000 uses an X-Y stage for positioning and a Z-lift for vertical contact motion.^[1]^[6]

The Summit 11000 series is used for DC and RF device characterization, wafer-level reliability, e-test, modeling, and yield enhancement.^[6]

Applications

The Summit 11000 is used for on-wafer high-frequency measurement and for characterization work that benefits from low noise, low leakage, and low capacitance.^[2]^[3]^[6]

What do the numbers mean?

Power & electrical3

Maximum Frequency (RF): 110 GHz^[2]
Wafer Chuck: 6-inch/150mm RF/Microwave chuck (Ni)^[6]
Maximum on-wafer RF frequency: 110 GHz^[2]

Wafer handling2

Wafer Size: 8 inch (200mm)^[1]
Supported wafer size: 8 inch (200 mm)^[1]

Optics & imaging6

X-Y resolution: 0.2″ per turn^[1]
X-Y Stage Resolution: 0.2 inch per turn^[1]
X-Y Stage Resolution (alternative): 0.1 μm resolution^[6]
Z Travel: 5mm with 1 μm resolution^[6]
X-Y stage resolution (manual): 0.2″ per turn^[1]
X-Y travel resolution: 0.1 µm^[6]

Performance3

Z-lift range: 5.5 mm linear lift with <2 µm repeatability^[1]
Z-lift Repeatability: < 2 μm^[1]
Z-lift range: 5.5 mm linear lift, repeatability <2 µm^[1]

Configuration & options8

X-Y stage travel: 203 mm × 203 mm^[1]
Z-lift Range: 5.5 mm linear lift^[1]
Bridge Travel (X): 6-inch X axis travel (+/- 3-inch from center of travel)^[6]
Bridge Travel (Y): 8-inch Y axis travel (+/- 4-inch from center of travel)^[6]
Bridge Z-lift: 3-inch linear manual Z-lift^[6]
Large area bridge X travel: 6 inch^[6]
Large area bridge Y travel: 8 inch^[6]
Large area bridge Z-lift: 3 inch linear manual^[6]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Maximum Frequency (RF)110 GHz^[2]
Wafer Chuck6-inch/150mm RF/Microwave chuck (Ni)^[6]
Maximum on-wafer RF frequency110 GHz^[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of tool is the Summit 11000?

The Summit 11000 is a manual wafer prober in the Summit 11000 series.^[6]^[1]

Not publicly documented

The following facts about the Summit 11000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Summit 11000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Summit 11000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Summit 11000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Summit 11000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Summit 11000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (6)Every fact above is drawn from these public sources

[1]inventory listing
[2]web.archive.org — cmj.cascademicrotech.com (Mar 13, 2009)web.archive.org
[3]Cascade Microtech Japan:プローブ･ステーション — cmj.cmicro.com (Jun 3, 2009)web.archive.org
[4]Inventory photo
[5]Inventory photo
[6]1spectrum.com — 1spectrum.com1spectrum.com