Brooks

MTX 2000 Wafer

Multiple IOSS Wafer ID Reader Brooks MTX 2000 Wafer family

Research Quality: 40% complete

The Brooks MTX 2000 Wafer Sorter is a wafer sorting system. The standard configuration of the Brooks MTX 2000 includes 2x Fixload V6, a Multiple IOSS Wafer ID Reader, 2x Brooks Robots, 2x Brooks Aligner, and a Greenlight Inspection Station.^[1]

MTX 2000 Wafer — Inventory photo — Fig. 01MTX 2000 WaferInventory photo^[2]

What it is

The Brooks MTX 2000 is a wafer sorter. The Brooks MTX 2000 was manufactured by Brooks.^[1]^[2]^[3]

What do the numbers mean?

Wafer handling6

Wafer size: Multiple IOSS Wafer ID Reader^[1]; 2x Brooks Robots^[1]
Type: Wafer Sorter^[1]
Components: 2x Fixload V6, Multiple IOSS Wafer ID Reader, 2x Brooks Robots, 2x Brooks Aligner, Greenlight Inspection Station^[1]
Component: Multiple IOSS Wafer ID Reader^[1]
Component: 2x Brooks Robots^[1]

Configuration & options10

2x Fixload V6^[1]; 2x Brooks Aligner^[1]; Greenlight Inspection Station^[1]
Make: Brooks^[1]
Model: MTX 2000^[1]
Component: 2x Fixload V6^[1]
Component: 2x Brooks Aligner^[1]
Component: Greenlight Inspection Station^[1]
Vintage: 2001^[1]
Vintage: 2002^[2]

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Not publicly documented

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Frequently asked questions

What type of equipment is the Brooks MTX 2000?

The Brooks MTX 2000 is a wafer sorter.^[1]^[2]^[3]

Not publicly documented

The following facts about the MTX 2000 Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MTX 2000 Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MTX 2000 Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MTX 2000 Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MTX 2000 Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MTX 2000 Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report