Axcelis
Integra
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Axcelis Integra is an etch system. The Integra handles 12-inch wafers. A variant of the Integra is the Integra ES Plasma Dry Strip.[1][2][3]
What it is
The Axcelis Integra is an etch tool for semiconductor manufacturing.[2]
How it works
General reference — not yet source-verifiedAn etch tool selectively removes material from wafer surfaces by exposing patterned areas to a controlled plasma or reactive process.
Plasma etch systems generally use energized process gases, a chamber, and wafer handling hardware to shape material removal across the wafer.
Where it fits in the process flow
General reference — not yet source-verifiedEtch equipment is used after pattern definition to transfer features into the underlying film stack.
Etch processing sits between lithographic patterning and later cleaning, stripping, or deposition steps in a fabrication flow.
What do the numbers mean?
Wafer handling1
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Integra ES Plasma Dry Strip | — | — | ES Plasma Dry Strip variant; 3-phase, 50/60 Hz power. | waferpedia.com[3] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of tool is the Axcelis Integra?
The Axcelis Integra is an etch tool.[2]
Not publicly documented
The following facts about the Integra are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the Integra are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Integra are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Integra are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Integra are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Integra is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Integra — Axcelis | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 1, 2026.
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