ASML
TWINSCAN NXE:3400C
Plate 01EUV lithography in action Inside the TWINSCAN NXE 3400 EUV lithography machine
Литография СтепперWatch on YouTube
Node / era
7 nm, 5 nm
Optics
13.5 nm (EUV)[1]
What it is
The ASML TWINSCAN NXE:3400C is an extreme ultraviolet (EUV) lithography system. The TWINSCAN NXE:3400C supports volume production at the 7 nm and 5 nm logic nodes.[1]
Where it fits in the process flow
The TWINSCAN NXE:3400C is used to print the most intricate, critical layers of advanced semiconductor chips. In a typical fab flow, the NXE:3400C prints the foundation layers for 7 nm and 5 nm logic nodes, while less critical layers are printed using deep ultraviolet (DUV) lithography systems.[1]
Applications
The TWINSCAN NXE:3400C is designed for high-volume manufacturing of advanced logic and memory chips. Chips produced with EUV lithography enable technologies such as smartphones, gaming consoles, augmented reality, and artificial intelligence.[1]
- High-volume manufacturing of advanced logic chips at 7 nm and 5 nm nodes
What do the numbers mean?
Optics & imaging4
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What nodes does the TWINSCAN NXE:3400C support?
The TWINSCAN NXE:3400C supports volume production at the 7 nm and 5 nm logic nodes.[1]
What is the numerical aperture of the NXE:3400C?
The NXE systems, including the NXE:3400C, have a numerical aperture (NA) of 0.33.[1]
What type of light source does the NXE:3400C use?
The NXE:3400C uses an extreme ultraviolet (EUV) light source with a wavelength of 13.5 nm.[1]
Why must the optical path of the NXE:3400C be in a vacuum?
EUV light is absorbed by everything, including air, so the entire light path from source to wafer must be in a high-vacuum environment.[1]
What is the resolution of the NXE lithography systems?
NXE systems print microchip features with a resolution of 13 nm.[1]
Not publicly documented
The following facts about the TWINSCAN NXE:3400C are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TWINSCAN NXE:3400C are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the TWINSCAN NXE:3400C are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the TWINSCAN NXE:3400C are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TWINSCAN NXE:3400C are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No publicly documented compatible parts, consumables, or accessories for the TWINSCAN NXE:3400C are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]asml.com — asml.comasml.com
Last updated Sep 22, 2026.
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