ASML
Twinscan AT 850 B Wafer
What it is
General reference — not yet source-verifiedWafer steppers are a class of photolithography exposure tools that project the image of a reticle onto a semiconductor wafer one exposure field at a time. Steppers succeeded earlier full-wafer mask aligners and became a standard production tool in advanced wafer fabrication. The Twinscan family is a line of lithography systems developed by ASML.
What do the numbers mean?
Power & electrical4
- 50/60 Hz[1]
Optics & imaging2
- Cymer laser[1]
Control & software2
Configuration & options8
Vintage & configurations
- 2002Vintage[1]
The source states 2002 vintage.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What are the main components and modules of the Twinscan AT 850 B?
The tool includes WS, WH, RH, and EIM modules, a chiller cabinet, a transformer cabinet, MDC, LCWC, MFCWC, and MCWC cabinets, an ACC air control cabinet, a Cymer laser, a Donaldson filter cabinet, and cables.[1][2]
Not publicly documented
The following facts about the Twinscan AT 850 B Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the Twinscan AT 850 B Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Twinscan AT 850 B Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Twinscan AT 850 B Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Twinscan AT 850 B Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Twinscan AT 850 B Wafer are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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