Waferpedia

ASM

Eagle 10 PETEOS

ASM Eagle 10 PETEOS family
Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

ASMEagle 10 PETEOS
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What is it?

The ASM Eagle 10 PETEOS is a semiconductor processing tool for 8 inch wafers, with a vintage of 1999.

What do the numbers mean?

Wafer handling1

Wafer size
8 inch[1]
Accurate?

Configuration & options2

Vintage
1999[1]
Accurate?
Version
3[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Version 3———semistarcorp.com[2]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the ASM Eagle 10 PETEOS handle?

The Eagle 10 PETEOS handles 200 mm (8 inch) wafers.[1][2]

Not publicly documented

The following facts about the Eagle 10 PETEOS are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Eagle 10 PETEOS are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Eagle 10 PETEOS are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Eagle 10 PETEOS are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Eagle 10 PETEOS is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Eagle 10 PETEOS are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]semistarcorp.com — semistarcorp.comsemistarcorp.com
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Last updated Oct 1, 2026.

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