Advanced Energy
Cesar RF Power
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Advanced Energy Cesar RF Power is a Class E switched-mode RF power supply family. The Advanced Energy Cesar RF Power is designed for semiconductor production and general plasma processing. The Advanced Energy Cesar RF Power line includes models with output frequencies from 2 MHz to 40.68 MHz and output power from 300 W to 5 kW.[1][2]
What it is
How it works
Where it fits in the process flow
The Cesar generator supports power delivery to the process step where plasma is generated or sustained, and that step may precede or accompany etch, deposition, cleaning, or surface treatment operations.[2]
Applications
The Cesar generator is used for sputtering, reactive ion etching, RF bias, plasma polymerization, plasma surface treatment, and CO2 laser systems.[2]
What do the numbers mean?
Power & electrical4
Control & software1
Configuration & options2
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What output frequencies are available for the Cesar platform?
The Cesar platform includes models at 2 MHz, 4 MHz, 13.56 MHz, 27.12 MHz, and 40.68 MHz.[1]
What power range does the Cesar platform cover?
The Cesar platform covers power output from 300 W to 5 kW.[1]
What input voltage options are available?
The Cesar platform uses 200 VAC and 400 VAC input options.[1]
What user interfaces and communications are available?
The Cesar platform includes an active front panel, analog I/O, and serial I/O options such as RS-232, Ethernet, and Profibus.[1]
Not publicly documented
The following facts about the Cesar RF Power are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Cesar RF Power are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Cesar RF Power are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Cesar RF Power are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Cesar RF Power are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Cesar RF Power is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]advancedenergy.com — advancedenergy.comadvancedenergy.com
- [2]idealvac.com — idealvac.comidealvac.com
- [3]Inventory photo
Last updated Oct 8, 2026.