Comparison ledger
Zeiss Axio, Zeiss Axio CSM 700, Zeiss Axio Imager M 2 m, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AxioZeiss | Axio CSM 700Zeiss | Axio Imager M 2 mZeiss |
|---|---|---|---|
| OEM | Zeiss | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — | — |
| Process node | — | — | — |
| Introduced | — | — | — |
| Production run | — | — | — |
| Lifecycle | — | — | — |
| Lifecycle milestones | — | — | — |
| Control system | — | — | — |
| Generation | — | — | — |
| Family | Zeiss Axio | Zeiss Axio | Zeiss Axio |
| Cited variants | — | — | |
| Specifications | |||
| Configuration | with Axiocam MRC camera[4] | with controller[5] | Model 430014-9902-000[7] |
| Observation methods | brightfield, darkfield[3] | — | — |
| Objectives | 5x, 10x, 20x, 50x, 100x, 150x[3] | — | 5x, 10x, 20x, 50x, and 100x Zeiss EC Epiplan-NEOFLUAR objectives (dark- and bright-field)[7] |
| Software | Zen 2.3 Lite[3] | — | Zeiss Zen Core, Zeiss Zen Pro[8] |
| Camera | Axiocam MRC[4] | — | Axiocam 712 mono or Axiocam 506 high resolution color camera[7] |
| Tall sample accommodation | custom adjustable armature[3] | — | — |
| Manual controls | objective turret, XY stage, focusing[3] | — | — |
| Type | optical microscope[3] | Confocal microscope[6] | — |
| Available objectives | 5x, 10x, 20x, 50x, 100x, 150x[3] | — | — |
| Imaging software | Zen 2.3 Lite[3] | — | — |
| Stage and controls | Manual objective turret, XY stage and focusing[3] | — | — |
| Sample height capacity | Tall samples can be accommodated[3] | — | — |
| Microscope type | — | Confocal microscope[6] | — |
| Scanning stage travel range | — | 150 x 150 mm[6] | — |
| Measurement rate | — | More than 100 frames per second[6] | — |
| Step height measurement range | — | 20 nm up to the millimetre range[6] | — |
| Depth of focus | — | Previously only offered by scanning electron microscopes (SEMs)[6] | — |
| Software analysis options | — | Measurement of roughness, evaluation of layer thickness, particle analysis[6] | — |
| Mosaic function | — | Captures large sample areas with a stitching algorithm that eliminates transitions in the final image[6] | — |
| Imperial units integration | — | Inches and microinches integrated into software[6] | — |
| Imaging | — | Three-dimensional visualization in true colour at high resolution[6] | — |
| Topographical measurement rate | — | More than 100 frames per second[6] | — |
| Step height range | — | From 20 nm up to the millimetre range[6] | — |
| Imaging modes | — | — | Bright Field (reflected and transmitted light), Dark Field, Polarized Light (PLM) (reflected and transmitted light), Differential Interference Contrast (DIC)[8] |
| Stage | — | — | Motorized xyz stage[7] |
| Autofocus | — | — | Laser autofocus system[7] |
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