Comparison ledger
SVG 8626, SVG 8626 Photoresist, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 8626SVG | |
|---|---|---|
| OEM | SVG | SVG |
| Category | — | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SVG 8626 | SVG 8626 |
| Specifications | ||
| Configuration | Cassette to cassette[1] | Cassette to cassette[3] |
| OEM | SVG[1] | SVG[3] |
| Model | 8626[1] | 8626[3] |
| Wafer size | 6 inch[1] | — |
| Coat stages | 2 coat[1] | — |
| Excludes | Pumps[1] | — |
| Process | 2 coat[1] | — |
| Includes | Excludes pumps[1] | — |
| Facility equipment listing | SVG 8626 6" Lift-Off resist and BARC Coat Track[2] | — |
| Wafer Size | — | 6 inch[3] |
| Number of Coats | — | 2 coat[3] |
| Pumps | — | Excluded[3] |
| Track Type | — | Dual track[4] |
| Hotplates | — | Included[4] |
| Equipment type | — | Photo Resist Coaters[4] |
| Wafer sizes | — | 6 inch[3] |
| Coat count | — | 2 coat[3] |
| Description | — | Dual Track Photoresist Coater With Hotplates[4] |