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150 e MaskversusUltraStep 1500

SUSS MicroTec 150 e Mask, Ultratech UltraStep 1500, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
150 e MaskSUSS MicroTec
UltraStep 1500Ultratech
OEMSUSS MicroTecUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySUSS MicroTec 150 e MaskUltratech UltraStep 1500
Specifications
Configuration—Spares[1]
Category—Lithography[2]
Wafer size range—2-6 inches[3]
Vintage—1991[1]
Laser—Present[2]
Receiver—Present[2]
Autoloader—Present[2]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]ds-semiconductor.comds-semiconductor.com