Comparison ledger
STS MXP Multiplex ICP, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1512eTegal | |
|---|---|---|
| OEM | STS | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | STS MXP Multiplex ICP | Tegal 1512e |
| Specifications | ||
| Configuration | Plasma Etcher[1] | — |
| OEM | STS[1] | — |
| Model | MXP Multiplex ICP[1] | — |
| Tool type | Inductively coupled plasma etcher[2] | Industrial RIE plasma etcher system[4] |
| Category | Etch[3] | — |
| Process | Plasma etching[2] | — |
| Stated configuration | — | With modules assembly for CI-4222[4] |
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