Waferpedia

Comparison ledger

11600 SRDversus8620 Dual Track Wafer

Semitool 11600 SRD, SVG 8620 Dual Track Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11600 SRDSemitool
OEMSemitoolSVG
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySemitool 11600 SRDSVG 8620 Dual Track Wafer
Specifications
ConfigurationCeramic[1]Double Sided[2]
ManufacturerSemitool[1]SVG[3]
Model11600 SRD[1]8620[3]
Equipment typeSpin Rinse Dryer[1]Dual Track Wafer Scrubber[3]
Wafer size—4 inch[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing