Comparison ledger
Semitool 003163-000 SRD, Semitool EQ 222 SR Spray Solvent, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 003163-000 SRDSemitool | EQ 222 SR Spray SolventSemitool |
|---|---|---|
| OEM | Semitool | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 003163-000 SRD | Semitool EQ 222 SR Spray Solvent |
| Specifications | ||
| Make | Semitool[1] | Semitool[2] |
| Model | 003163-000[1] | EQ 222 SR[2] |
| Equipment type | Spin Rinse Dryer (SRD)[1] | — |
| Asset # | 139375[1] | — |
| Last Confirm Date | September 03, 2025[1] | — |
| Phase | — | 3 Phase[2] |
| Configuration | — | 5 Wire[2] |
| Voltage | — | 208 V[2] |
| Product type | — | Spray Solvent Tool (SST)[2] |
| Electrical configuration | — | 3 Phase, 5 Wire, 208 V[2] |
| Frequency (one unit) | — | 50/60 Hz[3] |
| Vintage (some units) | — | 1998[2] |
| Vintage (one unit) | — | 1997[3] |
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