Comparison ledger
SCREEN WS 620 C, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | WS 620 CSCREEN | 11600 SRDSemitool |
|---|---|---|
| OEM | SCREEN | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN WS 620 C | Semitool 11600 SRD |
| Specifications | ||
| Configuration | Convertible to 8"[1] | Ceramic[3] |
| Manufacturer | SCREEN / DNS[1] | Semitool[3] |
| Model | WS 620 C[1] | 11600 SRD[3] |
| Tool type | Wet Bench[1] | — |
| Category | Wet Processing / Clean[2] | — |
| Wafer sizes | 6 inch[1] | — |
| Convertible to | 8 inch[1] | — |
| Tank configuration | Caro (SPM), H/C QDR, dHF, EDR, hotPhos, H/C QDR, SC1, QDR, SC2, H/C QDR, FR, IPA Vapor Dryer[1] | — |
| Equipment type | — | Spin Rinse Dryer[3] |
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