Comparison ledger
Proton H Series Hydrogen, Thermo Fisher 1300 Series Safety, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | H Series HydrogenProton | 1300 Series SafetyThermo Fisher |
|---|---|---|
| OEM | Proton | Thermo Fisher |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2019 Manufacturer upgrade | 2026 Third-party support only |
| Control system | — | — |
| Generation | — | — |
| Family | Proton H Series Hydrogen | Thermo Fisher 1300 |
| Specifications | ||
| Configuration | 3 HOGEN[1] | Class II[3] |
| Flow rate (upgraded) | 6 Nm³/hr[1] | — |
| Original flow rate | 2 Nm³/hr[1] | — |
| Upgrade year | 2019[1] | — |
| Operation time (this unit) | Approximately 18000 hours[1] | — |
| Type designation | HOGEN[1] | — |
| Equipment type | Hydrogen generator[1] | — |
| Application | Wet processing / clean[2] | — |
| Upgrade | Upgraded by manufacturer in 2019 from 2 Nm/hr to 6 nM/hr, with retrofit power supply update[1] | — |
| Operation time | Approximately 18000 hrs[1] | — |
| Cabinet type | — | Class II, Type A2 biological safety cabinet[4] |
| Airflow compensation | — | SmartFlow airflow compensation system[4] |
| Motors | — | Dual DC motors[4] |
| Front window design | — | SmartClean front window design[4] |
| Control panel | — | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[4] |
| UV light | — | Programmable UV light[4] |
| SmartPort | — | SmartPort convenience for routing tubing and cables through the side walls[4] |
| Available widths | — | 3-foot, 4-foot, 5-foot, and 6-foot sizes[4] |
| Front opening choices | — | 8-inch or 10-inch front opening[4] |
| Filter specification | — | H14 HEPA filters, EN 1822, 99.995% @ MPPS[5] |
| Certification | — | NSF/ANSI 49, UL, CE[5] |
| Service valves | — | Up to 6 total, 3 on each side wall[5] |
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