Comparison ledger
Mattson AST 2800, Mattson AST 2800 RTP, Mattson AST 2800 SMIF RTP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AST 2800Mattson | AST 2800 RTPMattson | AST 2800 SMIF RTPMattson |
|---|---|---|---|
| OEM | Mattson | Mattson | Mattson |
| Category | — | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — | — |
| Process node | — | — | — |
| Introduced | — | — | — |
| Production run | — | — | — |
| Lifecycle | — | — | — |
| Lifecycle milestones | — | — | — |
| Control system | — | — | — |
| Generation | — | — | — |
| Family | Mattson AST 2800 | Mattson AST 2800 | Mattson AST 2800 |
| Specifications | |||
| Manufacturer | Mattson[1] | — | — |
| Model | AST 2800[1] | — | — |
| Category | Thermal / Diffusion[2] | — | — |
| System type | rapid thermal process system[3] | — | — |
| Configuration | SMIF RTP[2] | Refurbished[4] | PRI Robot ATM307[5] |
| Control software | DOS 2.0[2] | — | — |
| Wafer handling | PRI Robot ATM307[2] | — | — |
| Phase | 3 phase[2] | — | 3 phase[5] |
| Configuration / options | Refurbished[3] | — | — |
| Software | — | — | DOS 2.0[5] |
| CIM | — | — | GEM[5] |