Comparison ledger
Laurell 750 Series, Laurell EDC-650-23B, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 750 SeriesLaurell | EDC-650-23BLaurell |
|---|---|---|
| OEM | Laurell | Laurell |
| Category | Resist Processing | Resist Processing |
| Wafer size | 150mm | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Laurell 750 Series | Laurell EDC-650-23B |
| Cited variants | — | |
| Specifications | ||
| Product type | Spin coater[2] | — |
| Interface | Enhanced touchscreen with intuitive interface[2] | — |
| Process control | Intelligent process control[2] | — |
| Data logging | Data logging[2] | — |
| Manufacturing | Engineered and assembled in the United States[2] | — |
| Type | Spin coater and spin processor[2] | EDC System[1] |
| Available wafer sizes | ø150mm, ø200mm, ø300mm[2] | — |
| Model | — | EDC-650-23B[1] |
| Controller Series | — | 650 Series[1] |
| Max Substrate Size | — | Ø150mm (5" × 5")[1] |
| Max RPM | — | 12,000 rpm[1] |
| Mounting Options | — | Tabletop, In-Deck, On-Deck[1] |
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