Waferpedia

Comparison ledger

120 Continuousversus6 DE-DC 1

Lapmaster 120 Continuous, Strasbaugh 6 DE-DC 1, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
6 DE-DC 1Strasbaugh
OEMLapmasterStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 120 ContinuousStrasbaugh 6 DE-DC 1
Specifications
Configuration—One Spindle[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing