Comparison ledger
Lapmaster 12 Lapper, Strasbaugh 6 DS SP Planarizer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 12 LapperLapmaster | 6 DS SP PlanarizerStrasbaugh |
|---|---|---|
| OEM | Lapmaster | Strasbaugh |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Strasbaugh 6 DS SP Planarizer |
| Specifications | ||
| Outside plate diameter | 12 inches[1] | — |
| Lapping Speed Range | 0 to 60 rpm[2] | — |
| Wafer Size Compatibility | 4 inches or smaller[1] | — |
| Input Voltage | 110 V[1] | — |
| Frequency | 60 Hz[1] | — |
| Phase | 1[1] | — |
| Number of Rings | 3[1] | — |
| Number of Weights | 3[1] | — |
| Includes Slurry System | Yes[1] | — |
| Includes Timer | Yes[1] | — |
| Wafer compatibility | — | 4", 6", 8"[3] |
| Throughput | — | 7 wafer/hour for 800sec of polishing / wafer[3] |
| Loader unit type | — | Carrier Entegris PA 194-60MB-61C02[3] |
| Number of cassettes | — | 2 lots at the same time / 4 cassettes inside the tool (2 sender, 2 receiver)[3] |
| Configuration | — | 4 cassettes inside the tool (2 sender, 2 receiver)[4] |
| Nominal wafer size | — | 6 inch[3] |