Comparison ledger
Lam Research IPEC 472, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | IPEC 472Lam Research | 100R16Strasbaugh |
|---|---|---|
| OEM | Lam Research | Strasbaugh |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research IPEC 472 | Strasbaugh 100R16 |
| Specifications | ||
| Configuration | Surface Automated[1] | — |
| Wafer size | 6 inch, 8 inch[2] | — |
| Category | CMP (Chemical Mechanical Polisher / Chemical Mechanical Planarization)[1] | — |
| Make / OEM | Lam / IPEC[1] | — |
| Model | 472[1] | — |
| type | — | 1 spindle grinder/polisher[4] |
| drive system | — | DC drive system with 2 motors[4] |
| spindle RPM | — | 1-180 RPM[4] |
| eccentric RPM | — | 1-90 RPM[4] |
| controls | — | digital timer; air down switch; spindle and eccentric speed dials; air regulators[4] |
| capacity | — | 16 inches[4] |
| spindle size | — | 1-8 TPI[4] |
| overall dimensions | — | 28 inches x 36 inches x 48 inches[4] |
| weight | — | 500 lbs[4] |
| origin | — | made in the USA[4] |