Comparison ledger
KLA 5100, KLA 5100 Overlay Measurement, KLA 5100 XP Overlay Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 5100KLA | ||
|---|---|---|---|
| OEM | KLA | KLA | KLA |
| Category | — | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — | — |
| Process node | — | — | — |
| Introduced | — | — | — |
| Production run | — | — | — |
| Lifecycle | — | — | — |
| Lifecycle milestones | — | — | — |
| Control system | — | — | — |
| Generation | — | — | — |
| Family | KLA 5100 | KLA 5100 | KLA 5100 |
| Cited variants |
| — | — |
| Specifications | |||
| Step measurement range | 100 Å to 300 µm[2] | — | — |
| Sample table | 200 mm with vacuum[2] | — | — |
| Maximum sample thickness | 20 mm[2] | — | — |
| Minimum sample length | 25 mm[2] | — | — |
| Wafer handling | Dual SMIF Cassette loader, 200mm[2] | — | — |
| Optics | 12k and 750 micron FOV optical microscopes with light source[2] | — | — |
| Microscope | 50 micron FOV with optical measurement, interferometer measurement, and autofocus[2] | — | — |
| Software | Windows NT / VAX[2] | — | — |
| Operating system | VMS[2] | — | — |
| Backup | SCSI back up unit[2] | — | — |
| Printer | Thermal mini printer[2] | — | — |
| Tool type | metrology and inspection tool[2] | — | — |
| Measurement application | overlay measurement on wafers[2] | — | — |
| Wafer size | 8-inch wafers[2] | — | — |
| Optical system | optical microscopes for measurement functions[2] | — | — |
| Microscope set | 12k microscope and a 750 micron field-of-view microscope with a light source[2] | — | — |
| Microscope functions | 50 micron field-of-view microscope performs optical measurement, interferometer measurement, and autofocus[2] | — | — |
| Measurement range | 100 Å to 300 µm[2] | — | — |
| Control software | Windows NT / VAX software[2] | — | — |
| Backup unit | SCSI Back up unit[2] | — | — |
| OS | — | VMS[3] | — |
| Configuration | — | Windows NT / VAX software[3] | — |
| Software Version | — | — | 14.70.01[4] |
| Robot Type | — | — | KLA Internal[4] |
| Handler | — | — | x3 Open Cassette[4] |
| Wafer Size | — | — | 8 inch[4] |