Comparison ledger
KLA .496 PSL Wafer, KLA Archer XT+ Overlay Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | KLA Archer |
| Specifications | ||
| Configuration | NIST Traceable[1] | New / Refurbished Items:[3] |
| Wafer size | 8 inch[1] | 200 mm / 300 mm[4] |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Software version | — | 5.60[3] |
| New system consumable parts | — | Shutter, HLS Lamp & Air Filters[3] |
| Family | — | KLA Archer[5] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →