Comparison ledger
KLA 2213-75 TSLKTB Argon, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2213-75 TSLKTB Argon | KLA .496 PSL Wafer |
| Specifications | ||
| Configuration | Compatible for KLA AIT II & XP Series Systems[1] | NIST Traceable[2] |
| Product type | Argon laser[1] | — |
| Part number | 2213-75TSLKTB[1] | — |
| Compatibility | KLA AIT II & XP Series Systems; AIT II, AIT XP, and AIT XP+ systems[1] | — |
| Condition / warranty | Refurbished; 1-year warranty or 5,000 hours[1] | — |
| Wafer size | — | 8 inch[2] |
| Traceability | — | NIST Traceable[2] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[2] |
| Category | — | Metrology & Inspection[3] |
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