Comparison ledger
KLA 2139, KLA 2139 Brightfield, KLA 2139 UI Brightfield Patterned Surface Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2139KLA | ||
|---|---|---|---|
| OEM | KLA | KLA | KLA |
| Category | — | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — | — |
| Process node | — | — | — |
| Introduced | — | — | — |
| Production run | — | — | — |
| Lifecycle | — | — | — |
| Lifecycle milestones | — | — | — |
| Control system | — | — | — |
| Generation | — | — | — |
| Family | KLA 2139 | KLA 2139 | KLA 2139 |
| Specifications | |||
| Model | 2139[1] | 2139[7] | 2139 UI Brightfield Patterned Surface Defect[9] |
| OEM | KLA-Tencor[1] | KLA[7] | KLA[9] |
| Wafer Size | 200mm[1] | — | — |
| Cassette Handling | Dual Open Cassette[1] | — | — |
| Tool Type | Surface Inspection System[1] | — | — |
| Voltage | — | 208 VAC[2] | — |
| Phase | — | 3 Phase[2] | — |
| Configuration | — | 30 A[2] | Ultra-Broadband Illumination[8] |
| Full load | — | 30A[3] | — |
| Power | — | 60[4] | — |
| Wafer inspector software | — | Rev. V5.4.010[5] | — |
| Full Load Current | — | 30 A[2] | — |
| Frequency | — | 50/60 Hz[2] | — |
| Vintage | — | 1996[2] | — |
| Wafer sizes | — | 6 inch, 8 inch[2] | — |
| Current (full load) | — | 30 A[2] | — |
| Software | — | WIN NT[6] | — |
| Type | — | Brightfield Inspection[7] | — |
| Wafer Sizes | — | 6, 8 inch[2] | — |
| Electrical | — | 208 VAC, 3 Phase, 30 A, 50/60 Hz[2] | — |
| Category | — | — | Metrology & Inspection[8] |
| Wafer size | — | — | 8 inch[8] |