Comparison ledger
KLA 1007, Semics Opus 3 SLT, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | Opus 3 SLTSemics |
|---|---|---|
| OEM | KLA | Semics |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Semics Opus 3 SLT |
| Specifications | ||
| Manufacturer | KLA[1] | Semics Inc.[4] |
| Model | 1007[1] | Opus 3 SLT[5] |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | 8 inches, 12 inches[3] |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | — |
| Type | — | Automatic[3] |
| Accuracy | — | 1.5 µm[3] |
| Chuck size | — | 175 x 200 mm[3] |
| Operating temperature | — | -40 to 200 °C[3] |
| Probing force | — | 230 kgf[3] |
| Overall dimensions | — | 1485 x 1720 x 960 mm[3] |
| Test temperature range | — | -55 °C to 200 °C[4] |
| Test temperature accuracy | — | ±1 °C[4] |
| Chuck load capacity | — | 200 kg[4] |
| Wafer Sizes Supported | — | 8 inches, 12 inches[4] |
| Test Temperature Range (Alternative) | — | -40 °C to 200 °C[3] |
| System Overall Accuracy | — | ±1.5 µm[4] |
| System Overall Accuracy (Alternative) | — | 1.5 µm[3] |
| Chuck Flatness | — | within 15 µm[4] |
| Die Size Range | — | 0.2 mm to 100 mm[4] |
| Acceptable Wafer Bow | — | 2 mm for 8-inch and 12-inch wafers[4] |
| MTBF | — | > 180 hours[4] |
| OCR Image Recognition and Auto Needle Alignment | — | Yes (upward-looking camera, fully automatic)[4] |
| GPIB Communication | — | Yes[4] |
| Mapping Format Compatibility | — | TSK, TEL, OPUS[4] |
| Cleaning Modes | — | CLEAN PAD (100 mm x 200 mm), CLEAN WAFER (8 & 12 inch)[4] |
| Remote Control | — | TeamViewer, VNC[4] |
| Operating Temperature | — | -40 to 200 Degree C[3] |
| Equipment Name | — | 高低温全自动探针台-Opus 3 SLT[4] |
| Instrument Number | — | 22007413[4] |
| Origin | — | Korea[4] |
| Temperature Range | — | -55℃~200℃[4] |
| Temperature Accuracy | — | ±1℃[4] |
| System Accuracy | — | ±1.5 um[4] |
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