Comparison ledger
KLA 1007, Multitest MT93xx, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | MT93xxMultitest |
|---|---|---|
| OEM | KLA | Multitest |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Multitest MT93xx |
| Specifications | ||
| Manufacturer | KLA[1] | — |
| Model | 1007[1] | — |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | — |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | — |
| Type | — | Gravity handler[3] |
| Contact sites | — | 4[3] |
| Temperature range | — | tri-temp from -55 to 155°C[3] |
| Maximum throughput | — | 20,500 uph[3] |
| Package support | — | Dedicated for SO and MLF/QFN packages[3] |
| Pitch | — | down to 0.4 mm[3] |
| Device length | — | 3 to 22 mm[3] |
| Loading and unloading | — | Kelvin tube and metal magazine loading and unloading[3] |
| Installed base | — | > 1,500 systems[3] |
| Device width | — | 3 to 15 mm[5] |
| Loading material | — | plastic and metal tubes, metal magazines[5] |
| Temperature accuracy | — | +/- 5°C for PTB application; +/- 2°C for STD application[5] |
| Temperature stability | — | +/- 0.5°C[5] |
| Power supply | — | 200V to 240V, 50Hz/60Hz, 16 Amps[5] |
| Power consumption | — | max 3,000 W[5] |
| Weight | — | typically 320 kg (280 kg to 370 kg depending on configuration)[5] |
| Compliance | — | CE, SEMI S2-02.00, SEMI S8-06.00[5] |
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