Waferpedia

Comparison ledger

1007versus4PP-TypeA

KLA 1007, KLA 4PP-TypeA, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
OEMKLAKLA
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1007KLA 4PP-TypeA
Specifications
ManufacturerKLA[1]—
Model1007[1]—
DescriptionWafer Prober[1]—
Wafer size150 mm[1]—
Convertible to 8 inch wafer sizeYes[1]—
Vintage01.06.1995[1]—
MakeKLA[2]—
Equipment typeProber[2]—
Product Type—Four-Point Probe[3]
Product type—Four-point probe (4PP)[4]
Spacing—1 mm[4]
Tip radius—40 um[4]
Force—100 gm[4]
Material—230-0913[4]
Application—Metal measurement[4]
Compatible measurement systems—Filmetrics R50 / R54 4PP measurement systems[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]Equipment inventory listing
  3. [3]store.kla-instruments.comstore.kla-instruments.com
  4. [4]store.kla-instruments.comstore.kla-instruments.com