Waferpedia

Comparison ledger

1.112 PSL WaferversusNSX 105 Wafer Bomping

KLA 1.112 PSL Wafer, Onto Innovation NSX 105 Wafer Bomping, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
NSX 105 Wafer BompingOnto Innovation
OEMKLAOnto Innovation
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1.112 PSL WaferOnto Innovation NSX 105 Wafer Bomping
Specifications
ConfigurationNIST Traceable[1]—
Wafer Size8 inch[1]—
NIST TraceableTrue[1]—
Compatible ToolsSurfscan 6xy0 and Sp1[2]—
Manufacturer—Onto Innovation[3]
Model—NSX 105 Wafer Bomping[4]
Wafer size—8 inch[4]
Category—Metrology & Inspection[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing