Waferpedia

Comparison ledger

WFH 4 D Wafer Robotversus1000 Family

Kensington WFH 4 D Wafer Robot, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1000 FamilyUltratech
OEMKensingtonUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKensington WFHUltratech 1000 Family
Cited variants—
Specifications
Configurationwith aligner[2]—
ManufacturerKensington[2]—
ModelWFH 4 D[2]—
Descriptionwafer robot with aligner[1]—
Wafer Sizes6 inch[2]—
Version150/200mm[1]—
Tool type—Photolithography step-and-repeat 1X stepper[3]
Optical design—Wynne Dyson[3]
Magnification—1X[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]inventory listing
  3. [3]en.wikipedia.orgen.wikipedia.org