Comparison ledger
Hitachi SU 8010, Hitachi SU 8030 FEG-SEM, Hitachi SU 8040, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SU 8010Hitachi | SU 8030 FEG-SEMHitachi | SU 8040Hitachi |
|---|---|---|---|
| OEM | Hitachi | Hitachi | Hitachi |
| Category | Metrology & Inspection | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 4" | — |
| Process node | — | — | — |
| Introduced | — | — | — |
| Production run | — | — | — |
| Lifecycle | — | — | — |
| Lifecycle milestones | — | — | — |
| Control system | — | — | — |
| Generation | — | — | — |
| Family | Hitachi SU | Hitachi SU | Hitachi SU |
| Specifications | |||
| Configuration | No PC[1] | Computer Controlled 5 Axis Motorized Stage (110mm x 110mm)[5] | Single Phase[6] |
| Type | Scanning electron microscope (SEM)[2] | — | — |
| Source | Cold field emission (CFE)[2] | — | — |
| Operating voltage range | 100 V to 30 kV[2] | — | — |
| Resolution | 1.3 nm at 1 kV[2] | — | — |
| Maximum magnification | 100kx[2] | — | — |
| Sample size | 50 mm diameter x 50 mm diameter[4] | — | — |
| EDS | Yes; EDS (Be 4 ~ U 92)[4] | — | — |
| Wafer size | — | 4" Wafer Holder for SU8030/SU8040[5] | — |
| Stage | — | Computer Controlled 5 Axis Motorized Stage (110mm x 110mm)[5] | — |
| Detector System | — | Triple Electron Detector System w/ Super ExB[5] | — |
| Specimen Airlock | — | 6" Specimen Exchange Airlock[5] | — |
| Beam Deceleration | — | Beam Deceleration System[5] | — |
| Vacuum System | — | TMP Dry Vacuum System[5] | — |
| EDS Integration | — | EDS Ready with DBC (P/N536-9805) and RS-232 Interface (P/N536-9807)[5] | — |
| Operating System | — | Windows XP[5] | — |
| Safety Compliance | — | UL and S2-02 Safety Compliance[5] | — |
| Voltage | — | — | 100V[6] |
| Current | — | — | 40A[6] |
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