Waferpedia

Comparison ledger

1088versus8100 Electronic Source

Heller 1088, KLA 8100 Electronic Source, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1088Heller
OEMHellerKLA
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHeller 1088KLA 8100
Specifications
Heating Zones8 zones (4 top and 4 below) plus 1 cooling zone[1]—
Heating MethodForced convection[1]—
Conveyor Width18 inches (45 cm)[1]—
Heated Length43.5 inches (111 cm)[1]—
Overall Length96 inches (244 cm)[1]—
Height50 inches (127 cm)[1]—
Net Weight900 lbs (409 kg)[1]—
Thermal ProfilerIncluded[1]—
Oven TopCounter balance for easy access to conveyor[1]—
Solder CompatibilityLead-free and leaded soldering[1]—
Base pressure post bake—3.20 E-10 Torr[2]
Filament current—2330 mA[2]
Temperature at current—1800 Kelvin[2]
Extraction voltage—3000 V[2]
Extraction current—105 uA[2]
Configuration—Refurbished[2]
Emitter radius—0.36 µm[2]
Distance tip protrudes from the suppressor—250 um[2]
Emitter chamber base pressure—<2*10-9 mbar[2]
Maximum emitter operating pressure—<5*10-9 mbar[2]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]smtdevices.comsmtdevices.com
  2. [2]inventory listing