Comparison ledger
Electroglas EG5, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EG5Electroglas | 1007KLA |
|---|---|---|
| OEM | Electroglas | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | 150mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Electroglas EG5 | KLA 1007 |
| Cited variants | — | |
| Specifications | ||
| Product line | EG5|300[1] | — |
| Variant | ARGOS[1] | — |
| Description | Electroglas' highest accuracy 300mm wafer prober[1] | Wafer Prober[2] |
| Probe-to-pad accuracy | ±2.5 micron[1] | — |
| Stepping accuracy | 1.0 micron[1] | — |
| Wafer sizes handled | 150mm, 200mm, and 300mm wafers[1] | — |
| Variant description | Fine-pitch probing for in-line parametric test structures[1] | — |
| Tool type | wafer prober[1] | — |
| Accuracy positioning | probe-to-pad accuracy of ±2.5 micron[1] | — |
| Handled wafer sizes | 150mm, 200mm, 300mm[1] | — |
| Model relation | EG5|300e is a fine-pitch probing model for in-line parametric test structures[1] | — |
| Manufacturer | — | KLA[2] |
| Model | — | 1007[2] |
| Wafer size | — | 150 mm[2] |
| Convertible to 8 inch wafer size | — | Yes[2] |
| Vintage | — | 01.06.1995[2] |
| Make | — | KLA[3] |
| Equipment type | — | Prober[3] |
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