Waferpedia

Comparison ledger

1034versusCM 210

Electroglas 1034, Signatone CM 210, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1034Electroglas
CM 210Signatone
OEMElectroglasSignatone
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyElectroglas 1034Signatone CM 210
Specifications
Chuck XY Stage Travel Range—205 mm x 205 mm (8.07 x 8.07 in)[1]
Chuck XY Travel Resolution (Standard)—14 μm Per Degree of Knob Rotation[1]
Chuck XY Travel Resolution (Fine)—1.5 μm Per Degree of Knob Rotation[1]
Chuck Z Stage Travel Range—2.5 mm (0.01 in)[1]
Chuck Z Stage Repeatability—± 1.0 μm[1]
Chuck Theta Stage Travel Range—± 11° (22°)[1]
Chuck Theta Stage Accuracy—< 1.0 μm (measured at the edge of the 200 mm chuck)[1]
Probe Platen Material—Nickel Plated Steel (Aluminum optional)[1]
Probe Platen Dimensions—L = 580mm x W = 637mm x H = 12.7mm[1]
Max Number of Micro Positioners—10x DC/HV or 2x RF + 4x DC or 4x RF + 2x DC or 2x CAP + 4x DC[1]
Contact Repeatability—< 1 μm (0.04 mils) by Manual Control[1]
Standard Wafer Chuck Diameter—203 mm[1]
Standard Wafer Chuck Surface Planarity—±6.5 μm[1]
Standard Wafer Chuck Rigidity—<3 μm / 10N at edge of the chuck[1]
Coax Chuck Operation Voltage—-200V to +200V DC[1]
Coax Chuck Max Voltage (Chuck to GND)—500 V DC[1]
Coax Chuck Isolation—> 150 GΩ[1]
Triax Chuck Isolation (Force to Guard @ 10V)—> 2 TΩ[1]
System Dimensions (Optional Table)—660 x 889 x 610 mm (26 x 35 x 24 in)[2]
System Weight (Optional Table)—109 kg (240 lbs)[2]
System Dimensions Including Table—863 x 1085 x 1370 mm (34 x 42.7 x 53.95 in)[2]
System Weight Including Table—385 kg (849 lbs)[2]
Available Thermal Chuck Options—Standard Hot (25°C to 300°C), Hot/Triax (25°C to 200°C), Hot/3kV Triax (25°C to 200°C)[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]signatone.comsignatone.com
  2. [2]microworld.eumicroworld.eu