Waferpedia

Comparison ledger

1034versusInspex Eagle

Electroglas 1034, KLA Inspex Eagle, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1034Electroglas
OEMElectroglasKLA
CategoryTest & ProbeTest & Probe
Wafer size—8"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyElectroglas 1034KLA Inspex Eagle
Specifications
Configuration—Chuck, 6”[1]
Wafer size—Wafer capability 4” up to 8"[1]
Chuck—6"[1]
Prealigner—6"[1]
Wafer capability—4" up to 8"[1]
Wafer handling—Cassette to cassette[1]
Ports—2[1]
Microscope—Zeiss Microscope[1]
Manuals—Including manuals[1]
Inspection type—Patterned Wafer Laser Inspection[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]solutions-on-silicon.comsolutions-on-silicon.com