Comparison ledger
Edwards Spectra G 800, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Spectra G 800Edwards | 1000PYES |
|---|---|---|
| OEM | Edwards | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Edwards Spectra G 800 | YES 1000P |
| Specifications | ||
| Configuration | 4 port inlets[1] | Parallel plate[4] |
| Phase | 3 Phase[1] | — |
| Maximum gas flow rate | 800 slm[2] | — |
| Number of inlet ports | 1 to 4[2] | — |
| Electrical supply | 200-208 VAC 3-phase[2] | — |
| Frequency | 50/60 Hz[2] | — |
| Power consumption | 4 kW[2] | — |
| Nitrogen supply pressure | 7 bar[2] | — |
| Fuel gas supply pressure | 137 mbar (2 psi)[2] | — |
| Extract flow rate | 60 Nm3/min[2] | — |
| Mass | 658 Kg[2] | — |
| Combustion stages | 4-stage[2] | — |
| Number of inlet ports (listing source) | 4 port inlets[1] | — |
| Model | — | 1000P[3] |
| System type | — | Plasma cleaning system[3] |
| Shelf configuration | — | Four 16 x 16 inch shelves[3] |
| Total capacity | — | 1024 square inches[3] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[3] |
| Number of shelves | — | 4[3] |
| Shelf size | — | 16 x 16 inches[3] |
| Power | — | 1000 W[4] |
| Operation modes | — | Active, RIE, Downstream[3] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[3] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →