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Comparison ledger

3220versus782-6

Disco 3220, Kulicke & Soffa 782-6, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
3220Disco
782-6Kulicke & Soffa
OEMDiscoKulicke & Soffa
CategoryDicing & GrindingDicing & Grinding
Wafer size—6"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 3220Kulicke & Soffa 782-6
Specifications
equipment typedicing saw[1]—
Workplace sizeø150 mm[2]—
Spindle layoutSingle[2]—
Spindle output1.5 kW at 30,000 min-1[2]—
Spindle max revolution speed40,000 min-1[2]—
X-axis feed speed range0.1 – 500 mm/s[2]—
Y-axis index step0.0001 mm[2]—
Z-axis repeating accuracy0.001 mm[2]—
Z-axis max blade sizeø58 mm[2]—
Maximum wafer size—up to 6" wafers[3]
Maximum wafer thickness—800 µm thick[3]
Materials diced—Si, Glass, Quartz, SiC, Sapphire, LiNbO3[3]
Kerf width—down to 50 µm (blade dependent)[3]
Blade cooling and rinsing—DI water[3]
Category—Dicing & Grinding[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]nanofab.ece.cmu.edunanofab.ece.cmu.edu
  4. [4]waferpedia.comwaferpedia.com